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Dry Pumps

For applications, process and maintenance engineers in semiconductor Fab, R & D and product manufacturing, who depend on reliable dry vacuum pumps for a myriad of low vacuum applications, the FMG Certified™ Rebuilt Dry Pumps provide a far more cost-effective alternative than new pumps.

Unlike OEMs, who are locked in to their corporate parts bin, FMG has more choices. That means we can and do select the best parts to fit your application and to ensure maximum reliability. FMG rebuilt Dry pumps are certified to incorporate the most rigorous standards for evaluation, rebuild, and testing; and, incorporate the highest quality OEM, equivalent, or superior parts. We have rebuilt Dry pumps from virtually all major manufacturers to OEM or better specifications, performance and reliability – a fact that brings OEMs to FMG to find out how to build better and more serviceable pumps!

And unlike other secondary pump rebuilders, FMG replaces everything to like-new or better condition.


The keys to FMG’s reputation for reliability and quality are our vertical integration, technician training, knowledge of all aspects of Dry pumps (including software and electronics), and experience in Fab operations. That’s why only FMG, after going through an extensive certification and validation process, has been awarded exclusive authorization for North America by a global tool manufacturer to repair and rebuild their newest version of a small, energy-efficient, highly reliable, light-weight and quiet Dry pump. It’s recognition that FMG goes the extra mile to get the job done right, and allows us to set a new standard for the rebuild industry.


  1. Disassembly: All FMG Certified™ Rebuilt Dry Pumps undergo a complete teardown, written evaluation and documentation. Parts are evaluated then brought to original OEM specifications. The pump, frame, flanges, electrical, exhaust, and N2 fittings/lines are all disassembled and cleaned. Additional parts are micrometer measured for critical clearances. Pumps sent in for evaluation, and other special pumps are digitally photographed.
  2. Cleaning: After solids removal, parts are first cleaned with a proprietary solution, then dried, blasted with plastic media to prevent metal removal, and placed in a Zero Emission Vapor Degreaser to remove any non-visible contaminants.
  3. Inspection: All critical parts are inspected. Parts requiring surface grinding are machined internally. Sleeves and Claws are re-coated (Teflon coating is optional). Scored or slightly grooved shafts are replaced with hard chrome shafts.
  4. Electrical: Each motor is inspected for bearing condition and noise level then tested: amp for each phase, armature, and simulated load. Motors are repaired upon request. Electronics are checked, latest software uploaded, and clock reset to zero (because it is as good as new).
  5. Assembly: Using factory-trained technicians, each pump is reassembled, clearances are measured and documented, and internal parts are lubricated with the proper oil. All pumps are tested to AVS standards.
  6. Paint: FMG Certified™ Pumps are painted with high VOC paint in OEM standard colors. Customer s can request special colors to indicate corrosive / non-corrosive, Fomblin, etc. High VOC paints are utilized to ensure that all volatile organic compounds are out-gassed in FMG's Bay Area Air Quality Permitted Spray Booth and not in the customer's facility.
  7. A complete Service Report is produced and saved electronically prior to shipment. Pumps are palletized and shipped utilizing a dust barrier wrap.

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Pump Types:
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Welch / Sargent

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