The standard vacuum turbo pump contains a stack of rotors. Each one of these rotors has many angled blades that spin at incredibly high speeds. When gas molecules are brought into the pump chamber, they are swept up by the underside of these angled blades. Momentum of the rotors forces the molecules outward until it exits through the outtake valve. The turbo pump, gas molecules enter through one main intake valve. In the Pfeiffer turbo pump, two rotors are mounted on a common axle, drawing in gas molecules from a single intake valve.
Turbo pumps are perfect for many high-vacuum applications that require an extremely clean, oil-free vacuum. Some of the applications where a turbo pump is commonly used include:
And other tasks in the semiconductor industry
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