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Turbomolecular Pumps
pumps & equipment library > Turbomolecular Pumps

The standard vacuum turbo pump contains a stack of rotors. Each one of these rotors has many angled blades that spin at incredibly high speeds. When gas molecules are brought into the pump chamber, they are swept up by the underside of these angled blades. Momentum of the rotors forces the molecules outward until it exits through the outtake valve. The turbo pump, gas molecules enter through one main intake valve. In the Pfeiffer turbo pump, two rotors are mounted on a common axle, drawing in gas molecules from a single intake valve.

Turbo pumps are perfect for many high-vacuum applications that require an extremely clean, oil-free vacuum. Some of the applications where a turbo pump is commonly used include:

  • Metal etching
  • Plasma Deposition
  • Sputtering
  • And other tasks in the semiconductor industry

The FMG Knowledge Center Library is expanding all the time, and we will be posting more information for this page in the near future. Please visit again soon or select from one of the options below. Thank you.

Personal Assistance:

Need more information about Turbo pumps then view FMG Turbo Pump Services, email us or call FMG:

(800) 327-6177
(408) 982-0110

Other Resources:

You can also find information at Wikipedia, the free encyclopedia:
http://en.wikipedia.org/wiki/Turbomolecular_pump

FMG Repairs & Rebuilds:

Need repair or rebuilding services, then look at the FMG Certified Program, and request a quote from us.

Sales & Supplies:

Looking to purchase new or used equipment then send us your request for a quotation. You can also request a list of our Monthly Specials. Lastly, you can request pricing for parts and fluids.
Call 800-327-6177 or 408-982-0110
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