In recent years, the cryogenic vacuum pump has become one of the most widely used vacuum pumps in the semiconductor industry. A cryovac pump operates by cooling internal elements down to cryogenic temperatures. Water vapor and nitrogen are cooled down to around 77 Kelvin, while activated carbon is cooled down to approximately 15 Kelvin and absorbs the other gases. This creates a vacuum.
Perhaps the biggest advantage to cryogenic compressor pumps, making them quite favorable to workers in the semiconductor industry, is that they are very hardy. They are much less susceptible to breaking down from too much pressure or accidental atmospheric venting. When the cryo pump gets warm, it temporarily stops pumping – instead going into regeneration mode. This is an extremely efficient feature that will save time and money by avoiding repair time and costs.
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