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Cryogenic Vacuum Pumps & Compressors
pumps & equipment library > Cryogenic Pumps

In recent years, the cryogenic vacuum pump has become one of the most widely used vacuum pumps in the semiconductor industry. A cryovac pump operates by cooling internal elements down to cryogenic temperatures. Water vapor and nitrogen are cooled down to around 77 Kelvin, while activated carbon is cooled down to approximately 15 Kelvin and absorbs the other gases. This creates a vacuum.

Cryogenic Compressor

Perhaps the biggest advantage to cryogenic compressor pumps, making them quite favorable to workers in the semiconductor industry, is that they are very hardy. They are much less susceptible to breaking down from too much pressure or accidental atmospheric venting. When the cryo pump gets warm, it temporarily stops pumping – instead going into regeneration mode. This is an extremely efficient feature that will save time and money by avoiding repair time and costs.

The FMG Knowledge Center Library is expanding all the time, and we will be posting more information for this page in the near future. Please visit again soon or select from one of the options below. Thank you.

Personal Assistance:

Need more information about Cryogenic pumps then view FMG Cryogenic Pump Services, email us or call FMG:

(800) 327-6177
(408) 982-0110

Other Resources:

You can also find information at Wikipedia, the free encyclopedia:
http://en.wikipedia.org/w/index.php?title=Vacuum_pump

FMG Repairs & Rebuilds:

Need repair or rebuilding services, then look at the FMG Certified Program, and request a quote from us.

Sales & Supplies:

Looking to purchase new or used equipment then send us your request for a quotation. You can also request a list of our Monthly Specials. Lastly, you can request pricing for parts and fluids.
Call 800-327-6177 or 408-982-0110
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